BDEAS

Bis(diethylamino)silane

Application : DRAM & Flash Dielectric

Chemical Name : BDEAS [Bis-Diethylamino Silane]

Formula : H2Si((N(C2H5)2)2

Molecular Weight : 174.4 g/mol

Boiling Point : 188℃

Vapor pressure : 4.0torr/ 20℃

Density : 0.811 g/mL

Phase at 25℃ : Colorless Liquid