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SiCl4
Silicon Tetrachloride
Application : DRAM & Flash Dielectric
Chemical Name : STC [Silicon Tetrachloride]
Formula : SiCl4
Molecular Weight : 169.89 g/mol
Boiling Point : 58 °C
Vapor pressure : 195 torr / 20℃
Density : 1.483 g/mL
Phase at 25℃ : Colorless liquid
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