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Bis(diethylamino)silane
Application : DRAM & Flash Dielectric
Chemical Name : BDEAS [Bis-Diethylamino Silane]
Formula : H2Si((N(C2H5)2)2
Molecular Weight : 174.4 g/mol
Boiling Point : 188℃
Vapor pressure : 4.0torr/ 20℃
Density : 0.811 g/mL
Phase at 25℃ : Colorless Liquid
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