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TDMAS (Tris(dimethylamino)silane)
DRAM & Flash Dielectric
Chemical Name : TDMAS [Tris-Dimethylamino Silane]
Formula : HSi((N(CH3)2)3
Molecular Weight : 161.32 g/mol
Boiling Point : 142℃
Vapor pressure : 3.5torr/ 20℃
Density : 0.88 g/mL
Phase at 25℃ : Colorless Liquid
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