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TDMAT : Tetrakis(dimethylamido)titanium(IV)
Application : DRAM High-k & Barrier & Metal, OLED Encapsulation
Chemical Name : TDMAT [Tetrikis-Dimethylamino Titanium]
Formula : Ti[N(CH3)2]4
Boiling Point : 50℃
Vapor pressure : 0.08torr/ 20℃
Density0.96 g/mL
Phase at 25℃ : Yellow Liquid
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