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TEMAZr
Tetrakis(ethylmethylamido)zirconium(IV)
Zr (지르코늄) precursor
반도체 DRAM Capacitor 제조공정에 사용.
ALD 공정에서 ZrO2 박막 증착 용도.
DRAM & Flash Dielectric
Chemical Name : TEMAZr [Tetrakis(ethylmethylamido)zirconium(IV)]
Formula : C12H32N4Zr
Molecular Weight : 323.63 g/mol
Boiling Point : 297℃
Vapor pressure : 0.005 torr/20℃
Density1.049 g/mL
Phase at 25℃ : Colorless to pale yellow liquid
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