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Application : DRAM & Flash DielectricChemical
Name : BTBAS [Bis(tertiarybutylamino) Silane]
Formula : [(CH3)3CNH]2SiH2
Molecular Weight : 174.86g/mol
Boiling Point : 167℃
Vapor pressure : 1.15torr/20 ℃
Density0.816 g/mL
Phase at 25℃ : Colorless Liquid
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